Inductively Couple Plasma Etcher

Excellent process performance

Excellent etching rate control

Excellent uniformity

High selectivity

Excellent profile control

Wide tuning window for process parameters

Small footprint

Streamlined system design

Flexible 4 chamber configurations

High Productivity

Low production costs

High throughput

Flexible control platform

Hermes-Epitek’s compound semiconductor etching system offers reliable and cost-effective solutions for the manufacturing of power devices and RF components.

The etching system is designed based on advanced 12-inch semiconductor processing equipment, leveraging the experience gained from 12-inch advanced semiconductor etching processes. As a result, it is built as next-generation 6/8-inch semiconductor etching equipment. The system offers numerous process adjustment capabilities, making it adaptable to a wide range of stringent process specifications.

ICP Eetcher offers flexible 4 chamber configurations.

 

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