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THC (Temperature & Humidity Controller)

Applications: Compatible with the clean track system of semiconductor front-end equipment, coater/developer

Wide-ranging settings (Temp: 20~27oC / Hum: 30~50% RH)

Precise control (Temp: +/- 1oC / Hum: +/- 0.5% RH)

Auto tuning (PID control for quick reach target temperature & humidity

Power saving and high energy efficiency

Real-time monitoring

SEMI S2, S10 certified

Hermes-Epitek’s Leister series THC (temperature and humidity controller) offers a reliable and cost-effective solution suitable for the clean track system of semiconductor front-end equipment and coater/developer that demand high precision temperature and humidity control and high energy efficiency.