Chiller

Applications: Compatible with semiconductor front-end and back-end equipment

High energy saving

Human Machine Interface

Low CoC, CoO

Highly customized design

High-precision temperature control

Wide temperature range (-20oC ~ 80oC)

Universal interface

Capable of CMS control & FDC monitor

Long duration data collection

CE, SEMI S22, F47 certified

Hermes-Epitek’s ODIN series chiller offers a reliable and cost-effective solution suitable for semiconductor front-end and back-end process equipment that demand high-precision temperature control.

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