E5-IHC (Indirectly Heated Cathode) System

Applications: Indirectly Heated Cathode Source Head system to replace obsolete Bernas source in the legacy Varian E500/E220 implanters

Extended lifetime (typical single charge：7 days - 54 days ; typical double charge：2 days - 12 days)

Gas saving (typical single charge：30~45% gas saving over Bernas)

Compatible with original software GUI (no operator re-train)

Field-proven stable match with original recipes

Quick installation

Hermes-Epitek’s E5-IHC Source Head assembly offers a more reliable, significant extended lifetime and cost-saving solution to replace the obsolete Bernas source in the legacy Varian E500/E220 implanters.

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