AIBT specializes in high-current ion implant solutions, with systems applicable from the 28nm to 2nm process and beyond.
Our solutions deliver exceptional productivity and industry-leading energy contamination control performance. This is attributable to our patented Chicane Beamline technology. iBlazar’s precise ISO scan mode is able to achieve superior uniformity (U%) in high-tilt, low-energy implantation. Its wide tilt-angle range, precise control, and compensation capabilities make iBlazar an ideal fit for versatile applications.
