Rotary/Ferrofluidic/Magnetic Feedthroughs by Applied Nano Technology Science Inc. (ANTS)

Applications: Rotary/Ferrofluidic/Magnetic Feedthroughs for a wide variety of process and inspection equipment include etchers, PECVD, diffusion furnaces, implanters, CD-SEM etc.

Long useful lilfe

Friction-free / particle-free

Low power consumption

High reliability in high vacuum/high RPM/high temperature conditions

Compatible with various equipment from Applied Materials, Axelis, Lam Research, TEL, Kokusai, Hitachi, AIBT etc.

Hermes-Epitek is an agent for Applied Nano Technology Science Inc. (ANTS) in the United States. Based in Taiwan, ANTS is dedicated to conducting R&D, and providing vacuum and nanotechnology products and services since 2001. It is a leading supplier of ferromagnetic feedthroughs to the semiconductor equipment industry. Apart from standard design, ANTS also provides customized design to meet specific requirements.

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